US Patent Issued to LAM RESEARCH on Sept. 1 for "Window edge heater for high power plasma processing applications" (California Inventors)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,725,759, issued on Sept. 1, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Window edge heater for high power plasma processing applications" was invented by Craig Rosslee (San Jose, Calif.), Ambarish Chhatre (Danville, Calif.), Dan Marohl (San Jose, Calif.) and David Setton (Danville, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A window support system for a plasma processing chamber includes a window support frame configured to circumscribe an opening. The window support frame has a top surface, a bottom surface, an inner surface, and an outer surface. Each of the inner surface and outer surface extends between the top surface and the ...