US Patent Issued to Lam Research on Oct. 20 for "Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,829, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.).

"Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system" was invented by Ranadeep Bhowmick (San Jose, Calif.), Alexei Marakhtanov (Albany, Calif.), Felix Leib Kozakevich (Sunnyvale, Calif.) and John Holland (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A first radiofrequency signal generator is set to generate a low frequency signal. A second radiofrequency signal generator is set to generate a high frequency signal. An impedance matching system has a first input connected to an output...