US Patent Issued to Lam Research on Oct. 20 for "Multi-station processing tools with station-varying support features for backside processing" (Oregon Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,839, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.).

"Multi-station processing tools with station-varying support features for backside processing" was invented by Nick Ray Linebarger Jr. (Beaverton, Ore.), Fayaz A. Shaikh (Lake Oswego, Ore.) and Arul N. Dhas (Sherwood, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Multi-station processing tools with station-varying support features for backside processing are provided. The support features in a first station may hold a wafer at a first set of points during backside deposition, blocking backside deposition, etching, or other processing at those points. The support feat...