US Patent Issued to Lam Research on May 5 for "RF reference measuring circuit for a direct drive system supplying power to generate plasma in a substrate processing system" (California Inventor)

ALEXANDRIA, Va., May 5 -- United States Patent no. 12,620,566, issued on May 5, was assigned to Lam Research Corp. (Fremont, Calif.).

"RF reference measuring circuit for a direct drive system supplying power to generate plasma in a substrate processing system" was invented by Maolin Long (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system includes a drive circuit, an RF reference measuring circuit, and a make-break connector. The drive circuit generates an RF drive signal at a first RF frequency. The RF reference measuring circuit includes an LC circuit having an input impedance and an output impedance. An output of the LC circuit connects to an RF power meter an...