US Patent Issued to Lam Research on May 19 for "Dual plenum fractal showerhead" (California Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,630,925, issued on May 19, was assigned to Lam Research Corp. (Fremont, Calif.).

"Dual plenum fractal showerhead" was invented by Clint Edward Thomas (Newark, Calif.), Jeremy Todd Tucker (Mountain View, Calif.) and Alan M. Schoepp (Ben Lomond, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A dual-plenum fractal (DPF) showerhead for distributing different semiconductor processing gases across a semiconductor wafer during processing operations is provided. The DPF showerhead may have a plurality of layers, each featuring a pattern of gas distribution features, with the gas distribution features on each layer generally being similar in shape to the g...