US Patent Issued to Lam Research on March 31 for "Apparatuses for cleaning a multi-station semiconductor processing chamber" (American, Indian Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,593,641, issued on March 31, was assigned to Lam Research Corp. (Fremont, Calif.).

"Apparatuses for cleaning a multi-station semiconductor processing chamber" was invented by Harish Kumar Premakumar (Bengaluru, India), Tongtong Guo (Beaverton, Ore.), Rachel E. Batzer (Tigard, Ore.), Bo Gong (Sherwood, Ore.), Francisco J. Juarez (West Linn, Ore.) and Ching-Yun Chang (West Linn, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are various systems that allow for plasma delivery from a central location in a multi-station processing chamber to be redirected to different processing stations within the chamber. Such systems may include a deflecto...