US Patent Issued to Lam Research on March 3 for "Undercoating coverage and resistance control for ESCS of substrate processing systems" (Oregon Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,565,701, issued on March 3, was assigned to Lam Research Corp. (Fremont, Calif.).

"Undercoating coverage and resistance control for ESCS of substrate processing systems" was invented by Tu Hong (Tualatin, Ore.), Chunhai Ji (Portland, Ore.), Pengyi Zhang (Beaverton, Ore.), Niraj Rana (West Linn, Ore.), Feng Bi (Lake Oswego, Ore.) and Ming Li (West Linn, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck (ESC) undercoating system includes a memory and a controller. The memory stores an undercoat application. The controller configured to execute the undercoat application to: determine undercoat parameters; perform a full clean proce...