US Patent Issued to Lam Research on March 24 for "Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system" (Oregon, Washington, California Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,586,757, issued on March 24, was assigned to Lam Research Corp. (Fremont, Calif.).

"Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system" was invented by Eller Y. Juco (Tualatin, Ore.), Karl Frederick Leeser (West Linn, Ore.), David French (Portland, Ore.), Sunil Kapoor (Vancouver, Wash.), Aaron Bingham (Newberg, Ore.), David Alan Metz (McMinnville, Ore.), Brett Herzig (San Jose, Calif.), Jacob L. Hiester (Newberg, Ore.) and Brian Knight (Beaverton, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A circuit tuning radio frequency (RF) power. The circuit includes a low to mid frequency (LF/HF) tunin...