US Patent Issued to Lam Research on March 17 for "Precursor dispensing systems with line charge volume containers for atomic layer deposition" (American, Indian Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,577,666, issued on March 17, was assigned to Lam Research Corp. (Fremont, Calif.).

"Precursor dispensing systems with line charge volume containers for atomic layer deposition" was invented by Saangrut Sangplug (Sherwood, Ore.), Aaron Durbin (Portland, Ore.), Murthi Murugaiyan (Bangalore, India), Aaron Blake Miller (West Linn, Ore.), Huatan Qiu (Portland, Ore.), Gopinath Bhimarasetti (Portland, Ore.), Vikrant Rai (Sherwood, Ore.) and Vincent Wilson (Beaverton, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A precursor dispensing system includes a source, an ampoule, a first valve, a second valve, a line charge volume container and a controller. Th...