US Patent Issued to Lam Research on March 17 for "Phased array antennas and methods for controlling uniformity in processing a substrate" (California Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,580,325, issued on March 17, was assigned to Lam Research Corp. (Fremont, Calif.).

"Phased array antennas and methods for controlling uniformity in processing a substrate" was invented by Luc Albarede (Fremont, Calif.) and John Stephen Drewery (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system for directing a main beam towards a gap within a plasma chamber is provided. The system includes an edge ring and a plurality of antenna elements coupled to the edge ring. The plurality of antenna elements includes a first antenna element and a second antenna element. The first antenna element receives a radio frequency (RF) signal having a...