US Patent Issued to Lam Research on March 17 for "Matching pre-processing and post-processing substrate samples" (California Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,917, issued on March 17, was assigned to Lam Research Corp. (Fremont, Calif.).

"Matching pre-processing and post-processing substrate samples" was invented by Yu Lu (Palo Alto, Calif.), Yansha Jin (Fremont, Calif.), Zhongkui Tan (Fremont, Calif.) and Mehmet Derya Tetiker (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Various embodiments herein relate to systems, methods, and media for matching pre-processing and post-processing substrate samples. In some embodiments, a computer program product for matching pre-processing and post-processing substrate samples is provided, the computer program product comprising a non-transitory ...