US Patent Issued to Lam Research on June 9 for "Vapor delivery device" (Oregon Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,649,970, issued on June 9, was assigned to Lam Research Corp. (Fremont, Calif.).

"Vapor delivery device" was invented by Thadeous Bamford (Portland, Ore.), Jorge Reyes (Tigard, Ore.) and Emile Draper (Molalla, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An evaporator assembly for a processing chamber in a substrate processing system comprises a canister configured to store and heat precursor liquid and an evaporator valve block mounted the canister. The evaporator valve block comprises a body, a plurality of valves mounted on the body, a carrier gas inlet in fluid communication with the canister, a precursor liquid inlet in fluid communication wi...