US Patent Issued to LAM RESEARCH on June 30 for "Pedestal including vapor chamber for substrate processing systems" (California Inventor)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,668,881, issued on June 30, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Pedestal including vapor chamber for substrate processing systems" was invented by Michael Wittig (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate support for a substrate processing system includes a pedestal including an upper surface and a lower surface. A vapor chamber is arranged between the pedestal and a baseplate, defines a vapor chamber cavity and includes a plurality of capillary structures arranged on a surface inside of the vapor chamber cavity."

The patent was filed on Nov. 26, 2019, under Application No. 17/295,935.

*For furth...