US Patent Issued to LAM Research on June 30 for "Component with protective surface for processing chamber" (Oregon, Texas, California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,671,064, issued on June 30, was assigned to LAM Research Corp. (Fremont, Calif.).

"Component with protective surface for processing chamber" was invented by Pylin Sarobol (Tigard, Ore.), Eric Samulon (Oakland, Calif.), Pankaj Hazarika (Sherwood, Ore.), Dennis Smith (San Jose, Calif.), Kurt Kern (Tigard, Ore.), Debanjan Das (Milpitas, Calif.), Darrell Ehrlich (San Jose, Calif.), Eric A Pape (Santa Cruz, Calif.) and Matthew Brian Schick (Pflugerville, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "A component for use inside a semiconductor chamber with a laser textured surface facing a vacuum region inside the semiconductor chamber is provided."

Th...