US Patent Issued to Lam Research on June 16 for "Gas distribution faceplate with oblique flow paths" (California Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,654,181, issued on June 16, was assigned to Lam Research Corp. (Fremont, Calif.).

"Gas distribution faceplate with oblique flow paths" was invented by Henry Stephen Povolny (Newark, Calif.), Andrew D. Bailey III (Milpitas, Calif.), Anthony de la Llera (Fremont, Calif.), Nebiyu Barsula Sermollo (Hayward, Calif.) and Shawn Tokairin (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Gas distribution faceplates are disclosed that feature clusters of gas passages extending from inlet gas ports on a first side thereof to outlet gas ports on a second side thereof. The gas passages may each have at least a portion thereof that is at an oblique angl...