ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,059, issued on July 28, was assigned to Lam Research Corp. (Fremont, Calif.).
"Synchronization of RF pulsing schemes and of sensor data collection" was invented by John Stephen Drewery (San Jose, Calif.), Ying Wu (Livermore, Calif.), Alexander Miller Paterson (San Jose, Calif.) and Luc Albarede (Fremont, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for synchronization of radio frequency (RF) pulsing schemes and of sensor data collection are described. One of the methods includes receiving, by an RF generator, a first set of one or more variable levels and one or more duty cycles of an RF signal. The method further includ...