US Patent Issued to Lam Research on July 28 for "Moveable edge rings with reduced capacitance variation for substrate processing systems" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,066, issued on July 28, was assigned to Lam Research Corp. (Fremont, Calif.).

"Moveable edge rings with reduced capacitance variation for substrate processing systems" was invented by Christopher Kimball (San Jose, Calif.), Hema Swaroop Mopidevi (Fremont, Calif.), Saravanapriyan Sriraman (Fremont, Calif.), Tom A. Kamp (San Jose, Calif.), Darrell Ehrlich (San Jose, Calif.), Anthony Contreras (Stockton, Calif.) and Chiara Helena Catherina Giammanco Macpherson (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An edge ring for a plasma processing system includes a first annular body configured to surround a substrate support during plasma ...