US Patent Issued to LAM RESEARCH on July 28 for "Bottom and middle edge rings" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,067, issued on July 28, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Bottom and middle edge rings" was invented by Hiran Rajitha Rathnasinghe (Fremont, Calif.), Shawn Tokairin (Fremont, Calif.) and Jon Mcchesney (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A bottom ring is configured to support a moveable edge ring that is configured to be raised and lowered relative to a substrate support. The bottom ring includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, a plurality of vertical guide channels provided through the bottom ring from the lower surface to the up...