US Patent Issued to Lam Research on Feb. 17 for "Deposition of molybdenum" (California, Washington Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,553,131, issued on Feb. 17, was assigned to Lam Research Corp. (Fremont, Calif.).

"Deposition of molybdenum" was invented by Shruti Vivek Thombare (Sunnyvale, Calif.), Naveen Kumar Mahenderkar (San Jose, Calif.), Lawrence Schloss (Palo Alto, Calif.) and Patrick A. Van Cleemput (Duvall, Wash.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided herein are methods of depositing molybdenum (Mo) films. The methods involve depositing a thin layer of a molybdenum (Mo)-containing film such a molybdenum oxide, a molybdenum nitride, or a molybdenum oxynitride. The Mo-containing film is then converted to an elemental Mo film. A bulk Mo film may then be deposit...