ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,944, issued on Aug. 4, was assigned to Lam Research Corp. (Fremont, Calif.).
"Modular-component system for gas delivery" was invented by John Folden Stumpf (Portland, Ore.), Damien Long (Felton, Calif.), Norman Nakashima (Lake Oswego, Ore.) and Karl Frederick Leeser (West Linn, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "In one embodiment, the disclosed apparatus is at least one gas-primitive substrate for use in a gas-delivery box. Each of the at least one gas-primitive substrates has at least one location on which a gas-delivery component is to be mounted. The at least one location has at least a gas-delivery component inlet port and a gas-...