US Patent Issued to Lam Research on Aug. 25 for "Method for arranging a semiconductor processing tool on a pedestal" (California Inventor)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,092, issued on Aug. 25, was assigned to Lam Research Corp. (Fremont, Calif.).

"Method for arranging a semiconductor processing tool on a pedestal" was invented by Travis Bentz (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for arranging a substrate processing tool on a pedestal within a semiconductor fabrication room includes supporting a plurality of pedestal plates on a pedestal frame including a plurality of stanchions. The method further includes determining dimensions of the pedestal plates, determining locations of installation features of the pedestal plates in accordance with components of the substrate processing t...