US Patent Issued to Lam Research on Aug. 11 for "Hybrid frequency plasma source" (California Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,278, issued on Aug. 11, was assigned to Lam Research Corp. (Fremont, Calif.).

"Hybrid frequency plasma source" was invented by Yuhou Wang (Fremont, Calif.), Alexander Miller Paterson (San Jose, Calif.), John Stephen Drewery (San Jose, Calif.) and Ying Wu (Livermore, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma system includes a first matchless plasma source (MPS) that generates a first sinusoidal waveform having a first frequency. The plasma system includes a first filter coupled to the first MPS to filter a second frequency. The plasma system further includes a first capacitive circuit coupled to the first filter to balance reacta...