US Patent Issued to LAM RESEARCH on April 7 for "Shield for plasma chambers" (Indian, American Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. D1,121,578, issued on April 7, was assigned to LAM RESEARCH Corp. (Fremont, Calif.).

"Shield for plasma chambers" was invented by Yogesh Mahesh Sovani (Bangalore, India), Ravikumar Patil (Bangalore, India), Jesu Titus Irudayaraj (Tamilnadu, India) and John Michael Kerns (Livermore, Calif.).

The patent was filed on Dec. 6, 2023, under Application No. D/919,824.

*For further information, including images, charts and tables, please visit: http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&co1=AND&d=PTXT&s1=D1121578&OS=D1121578&RS=D1121578

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