US Patent Issued to Lam Research on April 21 for "Control of pulsing frequencies and duty cycles of parameters of RF signals" (California Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,609,283, issued on April 21, was assigned to Lam Research Corp. (Fremont, Calif.).

"Control of pulsing frequencies and duty cycles of parameters of RF signals" was invented by Tom A. Kamp (San Jose, Calif.), Yuhou Wang (Fremont, Calif.) and Michael John Martin (Union City, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for pulsing is described. The method includes generating a first radio frequency (RF) signal, and pulsing a parameter of the first RF signal between a first parameter level and a second parameter level at a pulsing frequency during a cycle of a digital pulsed signal. The method further includes generating a second RF sign...