US Patent Issued to Lam Research on April 14 for "Soaking and ESC clamping sequence for high bow substrates" (Oregon Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,057, issued on April 14, was assigned to Lam Research Corp. (Fremont, Calif.).

"Soaking and ESC clamping sequence for high bow substrates" was invented by Feng Bi (Lake Oswego, Ore.), Kapu Sirish Reddy (Portland, Ore.), Niraj Rana (West Linn, Ore.), Ateeq Junaid Suria (Portland, Ore.) and Toshisato Ono (Tualatin, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for processing a substrate comprises a) delivering a substrate to a pedestal of an electrostatic chuck (ESC) of a processing chamber; b) increasing a pressure in the processing chamber to a first predetermined pressure in a first predetermined pressure range; c) soaking the subst...