US Patent Issued to L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude on April 7 for "Molybdenum imido alkyl/allyl complexes for deposition of molybdenum-containing films" (Japanese Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,595,556, issued on April 7, was assigned to L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude (Paris).

"Molybdenum imido alkyl/allyl complexes for deposition of molybdenum-containing films" was invented by Teruo Beppu (Yokosuka, Japan) and Yuki Ito (Yokosuka, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a chemical suitable for use as a volatile precursor for vapor phase depositions of Mo or Cr containing materials, the chemical represented by one of the following formulae:Use of the chemical for vapor phase depositions is demonstrated."

The patent was filed on March 2, 2023, under Application ...