US Patent Issued to KYOCERA Technologies on Aug. 25 for "Temperature-stable MEMS resonator" (Finnish Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,441, issued on Aug. 25, was assigned to KYOCERA Technologies Oy (Espoo, Finland).

"Temperature-stable MEMS resonator" was invented by Ville Saarela (Espoo, Finland), Matias Perttila (Espoo, Finland), Antti Jaakkola (Espoo, Finland), Aarne Oja (Espoo, Finland), Panu Koppinen (Espoo, Finland) and Antti Rautiainen (Espoo, Finland).

According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS (microelectromechanical system) resonator (150) comprising a substrate (105), a resonator element (100), and a cavity (110). The resonator element (100) is separated from the substrate (105) by said cavity (110), and the resonator element (100) comprises a layer of single-c...