ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,179, issued on July 28, was assigned to KURITA WATER INDUSTRIES LTD. (Tokyo).
"Functional aqueous solution supply apparatus" was invented by Yuuichi Ogawa (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "Functional aqueous solution supply apparatus (1) has a replenishment water production unit (3) that is supplied with ultrapure water (W) from a pipe conduit (2) and produces functional aqueous solution as washing water (W1), a storage tank (5) that is supplied/replenished with the produced washing water (W1) via a pipe (4), and a circulation pipe conduit (7) that supplies the washing water (W1) from the storage tank (5) to single-wafer type was...