US Patent Issued to KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE on June 30 for "Objective lens and charged particle beam apparatus including same" (South Korean Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,671,052, issued on June 30, was assigned to KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE (Daejeon, South Korea).

"Objective lens and charged particle beam apparatus including same" was invented by Takashi Ogawa (Daejeon, South Korea), In Yong Park (Daejeon, South Korea) and Jeong Woong Lee (Daejeon, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An objective lens for a charged particle beam apparatus that provides a charged particle beam to a sample, includes: a first electrode exposed to face a sample; a second electrode configured to focus a charged particle beam to the sample; a third electrode comprising a conical tip and a body ext...