US Patent Issued to KOREA INSTITUTE OF FUSION ENERGY on Oct. 20 for "Electrode for capacitively coupled plasma generating device, capacitively coupled plasma generating device comprising same, and capacitively coupled plasma uniformity adjusting method" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,827, issued on Oct. 20, was assigned to KOREA INSTITUTE OF FUSION ENERGY (Daejeon, South Korea).

"Electrode for capacitively coupled plasma generating device, capacitively coupled plasma generating device comprising same, and capacitively coupled plasma uniformity adjusting method" was invented by Jong Sik Kim (Gunsan-si, South Korea), Yong Hyun Kim (Gunsan-si, South Korea), Dae Chul Kim (Gunsan-si, South Korea), Young Woo Kim (Hwaseong-si, South Korea), Jong Bae Park (Gunsan-si, South Korea) and Jong Hyun Shin (Gunsan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are an electrode for a capacitively coupled plasma generati...