US Patent Issued to KOKUSAI ELECTRIC on Nov. 3 for "Substrate processing apparatus, apparatus start-up method, method of manufacturing semiconductor device, and recording medium for determining the need for authentication at start-up of a controller of the substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,787,690, issued on Nov. 3, was assigned to KOKUSAI ELECTRIC Corp. (Tokyo).

"Substrate processing apparatus, apparatus start-up method, method of manufacturing semiconductor device, and recording medium for determining the need for authentication at start-up of a controller of the substrate processing apparatus" was invented by Yasuhiro Mizuguchi (Toyama, Japan), Kyohei Matsuda (Toyama, Japan), Ichiro Nunomura (Toyama, Japan) and Kaori Inoshima (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a technique that includes a process chamber configured to be capable of processing a substrate; a main controller configured to be cap...