US Patent Issued to Kokusai Electric on June 30 for "Fluid supply system, processing apparatus, recording medium, and method of manufacturing semiconductor device" (Japanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,668,882, issued on June 30, was assigned to Kokusai Electric Corp. (Tokyo).

"Fluid supply system, processing apparatus, recording medium, and method of manufacturing semiconductor device" was invented by Kaoru Yamamoto (Toyama, Japan) and Kentaro Goshima (Toyama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a technique that includes: a flow rate controller configured to control a flow rate of fluid flowing in a pipe; an adjuster configured to supply an adjustment gas to at least a downstream side of the flow rate controller; and a controller configured to be capable of suppressing a phase change of the fluid, which is caused by...