US Patent Issued to KLA on Oct. 6 for "Field mirrors for imaging field compression driven photon efficiency and imaging wavefront improvement" (Connecticut Inventor)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,754,482, issued on Oct. 6, was assigned to KLA Corp. (Milpitas, Calif.).

"Field mirrors for imaging field compression driven photon efficiency and imaging wavefront improvement" was invented by Alon Rosenthal (Weston, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Collected light may be split into fields using grazing incidence mirrors to avoid illuminating gaps between the active areas for readout electronics. The grazing incidence mirrors may reduce lost field space in the integrating direction by splitting the imaging field in that direction to allow the readout electronics to be outside of the field. The fields may be split so there is space fo...