US Patent Issued to KLA on May 19 for "Cleanroom compatible robotic end effector exchange system" (California Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,472, issued on May 19, was assigned to KLA Corp. (Milpitas, Calif.).

"Cleanroom compatible robotic end effector exchange system" was invented by Benjamin James Thomas Clarke (Milpitas, Calif.), Asaf Wiseman (Milpitas, Calif.), Tzachi Pressburger (Milpitas, Calif.), Michael Brisman (Milpitas, Calif.) and Joseph A. Di Regolo (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The system includes a robot interface disposed on a robot arm, and an end effector configured to selectively couple to the robot arm via the robot interface. The end effector includes an upper jaw, a lower jaw, and a pair of arms configured to carry a substrate. The u...