ALEXANDRIA, Va., March 3 -- United States Patent no. 12,567,560, issued on March 3, was assigned to KLA Corp. (Milpitas, Calif.).
"Distortion reduction in a multi-beam imaging system" was invented by Michael I. Cook (Milpitas, Calif.), Sameet K. Shriyan (San Jose, Calif.) and David Dowling (Milpitas, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system may include a controller couplable to an imaging sub-system utilizing multiple particle beams, where the imaging sub-system includes one or more control elements to manipulate the two or more particle beams that are adjustable with two or more control parameters. The controller may select values of the two or more control parameters by iteratively pe...