US Patent Issued to KLA on March 24 for "Sensor configuration for process condition measuring devices" (California Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,588,460, issued on March 24, was assigned to KLA Corp. (Milpitas, Calif.).

"Sensor configuration for process condition measuring devices" was invented by Farhat A. Quli (Castro Valley, Calif.), Andrew Nguyen (San Jose, Calif.), James Richard Bella (San Jose, Calif.), Earl Jensen (Santa Clara, Calif.), Huey Tzeng (Milpitas, Calif.) and Jing Zhou (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A process condition measurement apparatus is disclosed. The apparatus includes a substrate, one or more insulation portions, a first plurality of interconnect traces, a second plurality of interconnect traces, and a plurality of sensors disposed on...