US Patent Issued to KLA on March 17 for "Detecting defects in array regions on specimens" (Chinese, American Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,284, issued on March 17, was assigned to KLA Corp. (Milpitas, Calif.).

"Detecting defects in array regions on specimens" was invented by Siqing Nie (Shanghai), Chunwei Song (Shanghai), Chaoqing Wang (Shanghai), Weifeng Zhou (Shanghai) and Xiaochun Li (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for detecting defects in an array region on a specimen are provided. One system includes an inspection subsystem configured for generating output responsive to patterned features formed in an array region on a specimen. The system also includes a computer subsystem configured for determining if a pitch of the patterned...