US Patent Issued to KLA on July 21 for "System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources" (California Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,690,118, issued on July 21, was assigned to KLA Corp. (Milpitas, Calif.).

"System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources" was invented by John Szilagyi (Livermore, Calif.) and Ilya Bezel (Mountain View, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An illumination system includes a gas containment vessel configured to contain a gas. The illumination system also includes one or more pump sources configured to generate one or more pump beams. The illumination system includes an ozone generation unit including one or more illumination sources. The one or more illumination sources...