US Patent Issued to KLA on July 21 for "Multimode defect detection" (California, Iowa Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,688,574, issued on July 21, was assigned to KLA Corp. (Milpitas, Calif.).

"Multimode defect detection" was invented by Sangbong Park (Union City, Calif.), Ge Cong (Pleasanton, Calif.), Eugene Shifrin (Sunnyvale, Calif.) and Richard Wallingford (Ames, Iowa).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and systems for detecting defects on a specimen are provided. One method includes generating first and second mode test, reference, and difference images of a specimen for first and second modes of an inspection subsystem, respectively. The method also includes combining the first and second mode test images, the first and second mode reference ima...