US Patent Issued to KLA on Feb. 24 for "Spectral angular metrology" (American, Israeli Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,560,548, issued on Feb. 24, was assigned to KLA Corp. (Milpitas, Calif.).

"Spectral angular metrology" was invented by Amnon Manassen (Haifa, Israel), Kevin Peterlinz (Fremont, Calif.), Andrew V. Hill (Berkley, Calif.), Shankar Krishnan (Santa Clara, Calif.), Yonatan Vaknin (Yoqneam Illit, Israel), Ido Dolev (Milpitas, Calif.), Suryanarayanan Ganesan (Milpitas, Calif.), Chao Chang (San Jose, Calif.), Jongjin Kim (San Jose, Calif.) and David Zimdars (Ann Arbor, Mich.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A metrology system may include a dual frequency comb source providing a first comb beam with a first repetition rate and a second comb beam wit...