US Patent Issued to KLA on Aug. 25 for "Mini environment instrumented wafer" (Israeli, American Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,721,111, issued on Aug. 25, was assigned to KLA Corp. (Milpitas, Calif.).

"Mini environment instrumented wafer" was invented by Giampietro Bieli (Santa Clara, Calif.), Andy Wijaya (Milpitas, Calif.), Mor Azaria (Migdal Ha'emek, Israel), Tsahi Muyal (Milpitas, Calif.), Izhar Agam (Milpitas, Calif.), Adi Pahima (Migdal Ha'emek, Israel) and Yoram Uziel (Yodfat, Israel).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system and method for measuring substrate processing conditions are disclosed. The system may include an instrumented substrate including a substrate body. The instrumented substrate may include one or more sensors configured to measure one or ...