ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,704,790, issued on Aug. 11, was assigned to KLA Corp. (Milpitas, Calif.).
"System and method for determining overlay measurement of a scanning target" was invented by Itay Gdor (Tel-Aviv, Israel), Yonatan Vaknin (Yoqneam Llit, Israel), Nireekshan K. Reddy (Tel Aviv, Israel), Alon Alexander Volfman (Tel-Aviv, Israel), Iftach Galon (Tel-Aviv, Israel), Jordan Pio (Milpitas, Calif.), Yuval Lubashevsky (Haifa, Israel), Nickolai Isakovitch (Tel-Aviv, Israel), Andrew V. Hill (Sunriver, Ore.), Oren Lahav (Tel-Aviv, Israel), Daria Negri (Nesher, Israel) and Vladimir Levinski (Migdal HaEmek, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method may inclu...