US Patent Issued to KLA on Aug. 11 for "Device and method to calibrate or verify the displacement-measurement system of an instrumented indenter" (Tennessee Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,704,447, issued on Aug. 11, was assigned to KLA Corp. (Milpitas, Calif.).

"Device and method to calibrate or verify the displacement-measurement system of an instrumented indenter" was invented by Warren Oliver (Knoxville, Tenn.) and Jennifer Hay (Farragut, Tenn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An optical detector determines a relative depth between a first position and a second position on an inclined surface. A controller determines a slope of the inclined surface based on the relative depth between the first position and the second position and the distance moved between positions. An actuator displaces a punch at a plurality of interm...