US Patent Issued to KLA on April 21 for "Back-illuminated sensor and method of making same" (California Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,610,640, issued on April 21, was assigned to KLA Corp. (Milpitas, Calif.).

"Back-illuminated sensor and method of making same" was invented by Ting Fung Chung (Milpitas, Calif.) and Sisir Yalamanchili (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An image sensor includes a p-type silicon layer, a silicon layer disposed on the p-type silicon layer, a p-type SiGe layer disposed on the p-type silicon layer, a boron layer disposed on the p-type SiGe layer, and an anti-reflective coating disposed on the boron layer. A trench can be formed in the image sensor such that the boron layer is disposed in the trench."

The patent was filed on Oct...