US Patent Issued to KLA on April 14 for "Multi-column large field of view imaging platform" (Israeli, American Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,979, issued on April 14, was assigned to KLA Corp. (Milpitas, Calif.).

"Multi-column large field of view imaging platform" was invented by Yonatan Vaknin (Yoqneam Llit, Israel), Amnon Manassen (Haifa, Israel) and Andrew V. Hill (Sunriver, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A measurement system may include an illumination source configured to generate one or more illumination beams and one or more objective lenses. One or more of the objective lenses may be configured as illumination objective lenses to direct illumination from the illumination source to one or more targets on a sample. One or more of the objective lenses may be con...