US Patent Issued to KIOXIA on May 19 for "Chemical solution supply system and chemical solution supply method" (Japanese Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,629,617, issued on May 19, was assigned to KIOXIA Corp. (Tokyo).

"Chemical solution supply system and chemical solution supply method" was invented by Yuichi Kuroda (Yokkaichi Mie, Japan) and Toshiyuki Muranaka (Yokkaichi Mie, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A chemical solution supply system including: a first tank that stores a first chemical solution; a first pipe that is connected to the first tank and conveys the first chemical solution; a first filter unit that is connected to the first pipe and has a first filter through which the first chemical solution is filtered; a first valve that is provided in the first pipe between the ...