US Patent Issued to Kioxia on July 7 for "Target processing device and target processing method" (Japanese Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,676,292, issued on July 7, was assigned to Kioxia Corp. (Tokyo).

"Target processing device and target processing method" was invented by Takeharu Motokawa (Zushi Kanagawa, Japan), Noriko Sakurai (Yokohama Kanagawa, Japan) and Hideaki Sakurai (Kawasaki Kanagawa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A target processing method includes: importing a target into a processing chamber; forming a film including carbon on the target using at least one of first ion including carbon and a first plasma including carbon; and removing the film by a reaction between a second plasma and the film, wherein the forming of the film and the removing of the fi...