US Patent Issued to Kioxia on July 28 for "Measurement device, measurement system, and measurement method" (Japanese Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,693,245, issued on July 28, was assigned to Kioxia Corp. (Tokyo).

"Measurement device, measurement system, and measurement method" was invented by Yuki Abe (Kuwana, Japan), Akira Hamaguchi (Yokkaichi, Japan), Takaki Hashimoto (Yokohama, Japan), Kazuhiro Nojima (Mie, Japan) and Kaori Fumita (Yokkaichi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A measurement device includes an X-ray irradiation section; an X-ray detection section configured to detect scattered X-rays generated from an object; and an analysis section configured to analyze diffraction images obtained through photoelectric conversion of the scattered X-rays and estimate a three-di...