US Patent Issued to KIOXIA on Feb. 17 for "Semiconductor manufacturing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,599, issued on Feb. 17, was assigned to KIOXIA Corp. (Tokyo).

"Semiconductor manufacturing apparatus" was invented by Makoto Kubo (Mie, Japan) and Masaharu Takizawa (Yokkaichi Mie, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor manufacturing apparatus includes a process container. A holder is disposed in the process container, and is arranged to hold a substrate including a first surface and a second surface on an opposite side to the first surface. The holder includes a mask portion that covers a first area of the first surface and exposes a second area different from the first area. The mask portion includes a first layer in ...