US Patent Issued to Kioxia on Aug. 11 for "Method of generating drop recipe, imprinting method, and method of manufacturing semiconductor device" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,704,777, issued on Aug. 11, was assigned to Kioxia Corp. (Tokyo).

"Method of generating drop recipe, imprinting method, and method of manufacturing semiconductor device" was invented by Katsuya Abe (Yokkaichi Mie, Japan) and Kazuya Fukuhara (Yokkaichi Mie, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of generating a drop recipe includes: acquiring first information indicating a position of a step and second information indicating a position of an outer edge of the substrate, in a first shot area among shot areas provided on a substrate; setting third information indicating a first area between the step and the outer edge, based on the f...